MEASUREMENT METHOD AND MEASUREMENT SYSTEM USING THE SAME

摘要

PURPOSE: A measurement method and a measurement system using the same are provided to improve effectiveness of a process by calculating optimized measurement rate by considering product quality and productivity elements. CONSTITUTION: A processing device(100) processes a lot using various methods according to a plurality of process conditions. The process condition includes options for satisfying regulations according to a semiconductor agreement or a customer request. A measurement device(130) is comprised in order to perform a measurement process with respect to the processed lot. The measurement device measures a particle, a defect, a thickness, or a critical dimension of a wafer. The lot processed by the processing device is established as a measured member.