| 摘要 |
<p>PURPOSE: A transfer apparatus of a large size substrate is provided to reduce manufacture costs by not using rotary shafts having longitudinal axes and to prevent the dropping of the large size substrate. CONSTITUTION: A rigid frame(10) is prepared on both sides of a transfer path of a large size substrate(S). An upper rotation axis(30) and a lower axis of rotation(20) are supported by an upper bearing(11) and a lower bearing(12) to be rotated. Gears(32, 22) transfer torque from the lower axis of rotation the upper rotation axis. A helical gear(23) receives the torque from a gear(40) and rotates the lower axis of rotation. A fluid spraying part(50) sprays fluid from the lower side of the center of the large size substrate to the upper side of the center of the large size substrate in order to prevent the dropping of the large size substrate.</p> |
