摘要 |
A linear motor includes a slider unit having a magnet row in which plural permanent magnets are arranged in series so that the same poles are opposed to each other, a stator unit including electromagnetic coils for plural phases arranged along a movement direction of the slider unit, and plural magnetic detector devices, wherein the plural magnetic detector devices are provided in response to the phases of the electromagnetic coils for plural phases and detect magnetic flux radially extending in a direction perpendicular to the arrangement direction of the permanent magnets at boundaries between the permanent magnets of the magnet row and output signal waveforms for plural phases at phases equal to phases of waveforms of back electromotive forces generated in the respective electromagnetic coils for plural phases when the magnet row moves.
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