| 摘要 |
PURPOSE: A laser pattern mask and a manufacturing method thereof are provided to reduce damage to a laser shielding pattern by forming a protection layer on a base substrate including the laser shielding pattern. CONSTITUTION: A laser shielding pattern(230) is made of opaque metal materials and is formed on a base substrate(200). The laser shielding pattern defines a laser passage area. A protection layer(240) is formed on the base substrate including the laser shielding pattern. The opaque metal material is selected among Al, Ag, or Au. The protection layer is made of MgF2 or SiO2. |
