CONTROLLER FOR POSITIONING DEVICE, METHOD FOR CONTROLLING POSITIONING DEVICE, POSITIONING DEVICE, AND LITHOGRAPHY APPARATUS PROVIDED WITH POSITIONING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a variable gain controller with lower sensitivity to noise amplification.

SOLUTION: A controller for a positioning device receives a position signal for showing the position of the positioning device, compares the position signal for obtaining an error signal with a set point signal showing a position desired by the positioning device, selectively changes the error signal based on an amplitude component and a frequency component of the error signal to obtain the changed error signal, and generates a control signal for controlling the positioning device based on the changed error signal. The controller may be applied for controlling the positioning device in a lithography apparatus.

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