| 摘要 |
PURPOSE: A retainer ring for a CMP head capable of efficiently fixing a wafer and a CMP head including the same are provided to efficiently prevent the problem of an edge effect by including a flexible member of the same material as a flexible membrane in an inner circumference. CONSTITUTION: A flexible membrane pressurizes a substrate. A retainer ring(200) is included in an outer circumference of the flexible membrane. A flexible member(210) is inserted into an inner circumference of the retainer ring. The flexible member and the flexible membrane are made of the same material. The flexible member and the flexible membrane are made of silicon rubber.
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