| 摘要 |
<P>PROBLEM TO BE SOLVED: To solve the problem that, in a near-field scan microscope using an aperture probe, aperture formation of several tens of nm is the limit in practical use and, in a near-field scan microscope using a scatter probe, a resolution of several tens of nm is the limit as an external illumination light becomes a background noise; furthermore, measurement reproducibility is extremely reduced by damage or wearing of the probe. <P>SOLUTION: A cylindrical structure of nanometer order and microparticles of nanometer order are combined to configure a plasmon-enhanced near-field probe having an optical resolution of nanometer order, and by repeating approach/turning-out with a low contact force at each measuring point on a sample, optical information and ruggedness information of a sample surface can be measured with a resolution of nanometer order and high reproducibility, without giving damage to both the probe and the sample. <P>COPYRIGHT: (C)2012,JPO&INPIT |
