发明名称 ELECTROMAGNETIC CASTING APPARATUS FOR SILICON INGOT
摘要 PURPOSE: An electronics molding device of a silicon ingot is provided to secure uniformity of a crystal of the transverse section of an ingot and to prevent the degradation of product yield. CONSTITUTION: A radiation thermometer(16) is installed outside a monitoring window(15). The monitoring window is arranged to be faced to two sides(3a, 3b) which are parallel each other among fourth sides of an ingot(3). An insulating material(17) is inserted between the upper side of an after heater(9) and the lower side of a cooled crucible(7). A through hole(18a) is formed in a site which faces to a center part of each side of the ingot. A back mirror(19) is installed on the outer side of the through hole of the insulating material.
申请公布号 KR20120024347(A) 申请公布日期 2012.03.14
申请号 KR20100134401 申请日期 2010.12.24
申请人 SUMCO CORPORATION 发明人 KOYA HIROSHI;TAKEMURA YASUO
分类号 C30B29/06;C01B33/021;C30B11/00;H01L21/02 主分类号 C30B29/06
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