| 摘要 |
<P>PROBLEM TO BE SOLVED: To arrange both an inside heater and an outside heater, in a heater unit including both the heaters, by correctly positioning them so that temperature irregularity does not occur. <P>SOLUTION: A heater unit 1 includes: a pedestal 2 placed on a floor; a center side support pillar 3 fixed to the pedestal 2; a support 11 fixed to the pedestal 2 and supporting a heater base 6; a wafer holder 5 placing a semiconductor wafer 200 (refer to Fig.3) processed to have an approximately circular shape; and the hater base 6. The support 11 has: an upper side member 111 located on a side of the heater base 6; and a lower side member 112 located on a side of the pedestal 2. The upper side member 111 and the lower side member 112 constituting the support 11 are separated and brought into contact with each other, but are not fixed. <P>COPYRIGHT: (C)2012,JPO&INPIT |
