发明名称 MEMORY CELL, MEMORY DEVICE AND METHOD FOR MANUFACTURING MEMORY CELL
摘要 A memory cell including a substrate, a stacked gate structure and a first isolation structure is provided. The substrate has a first doped region, a second doped and a channel region located between the first doped region and the second doped region. The stacked gate structure is disposed on the channel and at least includes a charge trapping layer and a gate from bottom to top. The first isolation structure is disposed in the substrate and is connected to the first doped region and extends downwards from the first doped region for a predetermined length, and a bottom of the first isolation structure is lower than a bottom of the first doped region.
申请公布号 US2012056259(A1) 申请公布日期 2012.03.08
申请号 US20100877284 申请日期 2010.09.08
申请人 CHEN PO-CHOU;CHANG YAO-WEN;YANG I-CHEN;MACRONIX INTERNATIONAL CO., LTD. 发明人 CHEN PO-CHOU;CHANG YAO-WEN;YANG I-CHEN
分类号 H01L29/68;H01L21/762 主分类号 H01L29/68
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