<p>The present invention relates to a nozzle head (2) for subjecting a surface (4) of a substrate (6) to successive surface reactions of at least a first precursor (A) and a second precursor (B). The nozzle head (2) comprising two or more first precursor nozzles (8) for the first precursor (A), the first precursor nozzle (8) having at least one first inlet port (18) and at least one first outlet port (20), two or more second precursor nozzles (10) for the second precursor (B), the second precursor nozzle (10) having at least one second inlet port (22) and at least one second outlet port (24). According to the invention the nozzle head (2) comprises at least one first connection element (30) for conducting first precursor (A) from the one first precursor nozzle (8) to the one or more other first precursor nozzles (8).</p>
