发明名称 COOLING DRUM MASK
摘要 PURPOSE: A cooling drum mask is provided to prevent a flexible film from becoming deformed by heat since when plasma occurs, cooling water flows in a mask block and a shield. CONSTITUTION: A cooling drum mask comprises a frame type of a mask block(155), a shield(163), an inlet(157), an outlet(159), and a path. The mask block comprises a hole(158), through which plasma passes. The shield is mounted on the mask block and adjusts the width of a hole. Cooling water is supplied to the mask block through the inlet. The cooling water is discharged from the mask block through the outlet. The path is connected to the inlet and the outlet and is formed in the mask block to circulate the cooling water. A cooling block is formed on the shield. The cooling block comprises an inlet, an outlet and a path.
申请公布号 KR101118193(B1) 申请公布日期 2012.03.05
申请号 KR20110072161 申请日期 2011.07.20
申请人 KIM, MIN HO;A.T CO., LTD. 发明人 KIM, MIN HO;KIM, KYUNG DUK;LEE, CHUN GUN;LEE, JAE HOO
分类号 C23C14/40;C23C14/56 主分类号 C23C14/40
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