| 摘要 |
An image sensor prevented from detecting interference fringes even if illuminating light of high coherence is used. The image sensor has a light-receiving clement and a protective member (lid), which are integrally secured to a package. An anti-reflection coating for illuminating light is formed on the surface of the light-receiving element, or the distance between the surface of the light-receiving element and the light-receiving element-side surface of the lid is determined to be not shorter than a half of the coherence length of the illuminating light. Alternatively, the protective member is inclined with respect to the surface of the light-receiving element. Since the image sensor detects no interference fringes, it is possible to improve the accuracy of observation, image processing and measurement, etc.
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