发明名称 |
Heat shield plate for substrate annealing apparatus |
摘要 |
A heat shield plate for a substrate annealing apparatus is provided with a horizontally supported flat-plate-like substrate 1, a heater 5 positioned above the substrate to heat the upper surface of the substrate with radiation heat, and a heat shield plate 10 horizontally movable between a shielding position where the substrate is shielded from heater and an open position out of the shielding position. The heat shield plate 10 is composed of a structural member 12 made of a low thermal expansion material (carbon composite material) which is hardly deformed due to a temperature difference in the shielding position, and a heat insulating member 14 which covers the upper surface of the structural member and keeps the surface at an allowable temperature or below.
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申请公布号 |
US8118591(B2) |
申请公布日期 |
2012.02.21 |
申请号 |
US20070280811 |
申请日期 |
2007.03.15 |
申请人 |
ISHIHARA TERUMASA;HASHIMOTO TAKAHARU;MIZUNO MASAYUKI;MORITA MASARU;IHI CORPORATION |
发明人 |
ISHIHARA TERUMASA;HASHIMOTO TAKAHARU;MIZUNO MASAYUKI;MORITA MASARU |
分类号 |
F27D5/00;F27D99/00;H01L21/205;H01L21/26;H01L21/31 |
主分类号 |
F27D5/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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