Device for depositing polycrystalline silicon on thin rods, comprises an electrode for a power supply of thin rods, a quartz element and/or a graphite element present on the electrode and/or a mold body made of silicon

摘要

The device comprises an electrode (1) for a power supply of thin rods (5), a quartz element (2) and/or a graphite element above the electrode and/or a mold body (4) made of silicon. The electrode, the quartz element and the mold body has an opening for receiving the thin rod. The graphite element is a graphite ring, which is laid on the electrode and fitted into a hollow cylinder made of quartz forming the quartz element. The quartz element is the hollow cylinder composed of quartz, and has a quadratic milling groove for receiving the thin rod. The device comprises an electrode (1) for a power supply of thin rods (5), a quartz element (2) and/or a graphite element above the electrode and/or a mold body (4) made of silicon. The electrode, the quartz element and the mold body has an opening for receiving the thin rod. The graphite element is a graphite ring, which is laid on the electrode and fitted into a hollow cylinder made of quartz forming the quartz element. The quartz element is the hollow cylinder composed of quartz, and has a quadratic milling groove for receiving the thin rod. A carbon fiber reinforced carbon-film (3) is located between the quartz element and the mold body. A cation-exchange capacity-film has a larger cross-section than the electrode. The mold body is shaped as a Czochralski- or float zone-end cone.