发明名称 RING LIGHT ILLUMINATOR, BEAM SHAPER AND METHOD FOR ILLUMINATION
摘要 <p>A ring light illuminator with annularly arranged light sources is disclosed. To each light source there corresponds a light collector, a homogenizing means for light from the light source, and an anamorphic system for imaging an output of the homogenizing means into an area to be illuminated. The anamorphic system compensates deformations of a cross-sectional area of a light beam in a surface to be illuminated due to an oblique angle of incidence of the light beam onto the surface. The homogenizing means in embodiments is a rod, into which light from the light collector is directed. The end of the rod opposite the light collector is imaged by the anamorphic system into the area to be illuminated on the surface. Also disclosed is a method for illumination.</p>
申请公布号 WO2012014141(A1) 申请公布日期 2012.02.02
申请号 WO2011IB53300 申请日期 2011.07.25
申请人 KLA-TENCOR CORPORATION;BUGES, DACIAN 发明人 BUGES, DACIAN
分类号 F21S2/00;F21V8/00 主分类号 F21S2/00
代理机构 代理人
主权项
地址