Microscopic infrared analysis by X-ray or electron radiation

摘要

An infrared (IR) emission spectroscopy and microscopy apparatus with X-ray excitation or electron excitation and an improved process for extending spatial relation of infrared (IR) microscopy and performing microscopic infrared (IR) analysis by X-ray or electron radiation are provided. By utilizing nanometer sized X-ray beams or electron beams to produce IR emission, the spatial resolution of IR microscopy is extended. Simultaneously performing X-ray or electron-based spectroscopy as well as structural studies are enabled.