NOZZLE CLEANING APPARATUS, SUBSTRATE COATING APPARATUS INCLUDING THE SAME,申请号KR20090117756-传众专利搜索

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发明名称	NOZZLE CLEANING APPARATUS, SUBSTRATE COATING APPARATUS INCLUDING THE SAME
摘要
申请公布号	KR101109079(B1)	申请公布日期	2012.01.31
申请号	KR20090117756	申请日期	2009.12.01
申请人		发明人
分类号	H01L21/027;H01L21/00	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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