| 发明名称 |
STACKED PROCESS MODULES FOR A SEMICONDUCTOR HANDLING SYSTEM |
| 摘要 |
Methods and systems are provided for a vacuum-based semiconductor handling system. The system may be a linear system with a four-link robotic SCARA arm for moving materials in the system. The system may include one or more vertically stacked load locks or vertically stacked process modules.
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| 申请公布号 |
US2012014769(A1) |
申请公布日期 |
2012.01.19 |
| 申请号 |
US201113248600 |
申请日期 |
2011.09.29 |
| 申请人 |
BROOKS AUTOMATION, INC. |
发明人 |
VAN DER MEULEN PETER |
| 分类号 |
H01L21/677;B25J17/00;B65G1/00;B66C1/00;F26B5/04;F26B13/30;G06F7/00;G06F19/00;H01L;H01L21/00 |
主分类号 |
H01L21/677 |
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