| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for drawing a charged particle beam which reduces the drawing time when performing the multiple drawing. <P>SOLUTION: A drawing device 100 includes: a division part 50 which virtually divides a chip region in which a pattern is formed into a plurality of small areas; a multiplex degree computing/setting part 64 which sets the multiplex degree for drawing the pattern in the small areas for every small area so that the multiplex degree different from the others is set to at least a part of the plurality of the small areas obtained by virtual division of the chip region; and a drawing part 150 which draws the pattern in the small areas with the multiplex degree set for every small area using the charged particle beam. <P>COPYRIGHT: (C)2012,JPO&INPIT |
