SEMICONDUCTOR DEVICE AND METHOD FOR FORMING THE SAME

摘要

PURPOSE: A semiconductor device and a formation method thereof are provided to easily connect a storage electrode contact plug to an active region in the semiconductor device which includes a buried gate, thereby improving characteristics of the semiconductor device. CONSTITUTION: A semiconductor substrate(150) comprises a cell region(i) and a peripheral circuit region(ii). The semiconductor substrate comprises an active region(154) which is defined as a device separation film(152). An epitaxial silicon layer(164) is grown in the upper part of the active region. A bit line contact plug(172) is connected to the epitaxial silicon layer. A storage electrode contact plug(180) is connected to the epitaxial silicon layer.