| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a processing apparatus having a simplified mechanism for generating downflow. <P>SOLUTION: A processing apparatus has air flow generating means 150 for generating downflow, mist separating means 240 disposed in a circulation path member 200 so that mist contained in downflow target gas is separated from the gas, and a waste liquid port 213 which is disposed in the circulation path member 200 and withdraws the mist which is separated by the mist separating means 240 and liquefied. The downflow target gas is circulated between a processing chamber 100 and the circulation path member 200. <P>COPYRIGHT: (C)2012,JPO&INPIT |
