FLUORESCENT X-RAY ANALYSIS DEVICE AND METHOD

摘要

Disclosed is a fluorescent X-ray analysis device comprising: a sample base (8) which has a sample (S) having a crystalline structure placed thereon; an X-ray source (1) which directs primary X-rays (2) onto the sample (S); detection means (7) which detects secondary X-rays (4) from the sample (S); rotation means (11) which rotates the sample base (8); parallel movement means (12) which moves the sample base (8) in a parallel manner; selection means (17) which selects at least three avoidance angles, which have an adjacent separation of less than 180° and make it possible to avoid diffracted X-rays, in accordance with a diffraction pattern acquired corresponding to the angle of rotation of the sample (S) and the intensity of the secondary X-rays (4) generated at said angle of rotation; and control means (15) which controls the rotation means (11) in such a way that the sample (S) is set at an avoidance angle such that the sample base (8), the rotation means (11), and the parallel movement means (12) do not interfere with other structures of the device.