DRESSING HEAD OF POLISHING PAD

摘要

A dressing head of a polishing pad includes a bearing block (6), a spindle (14), a protection cover (5), a press disc (3), an adaptive disc (19), a diamond disc (1) and a flexible ring (18). A flange (15) is installed at the lower end of the spindle. A presser bit (17) is installed on the lower surface of the flange. The upper rim (181) of the flexible ring is clamped between the flange and the presser bit, and the lower rim (182) thereof is clamped between the protection cover and the press disc. The flexible ring, the flange, the press disc and the adaptive disc form a sealed chamber (M) together. The protection cover, the press disc, the adaptive disc and the diamond disc are rotated with the spindle via the flexible ring, and move up and down relative to the spindle by the telescopic deformation of the flexible ring. The dressing head of the polishing pad has simple structure and stable operation, and the diamond disc has adaptability, so that the dressing precision and the dressing efficiency of the polishing pad are increased.