| 摘要 |
<p>PURPOSE: A solar battery manufacturing method for increasing the energy conversion efficiency of the solar battery is provided to increase the energy conversion efficiency of the solar battery by restoring plasma damage in a solar battery manufacturing process. CONSTITUTION: A solar battery(100) includes a silicon substrate(110), an upper electrode(120), a reflection barrier layer(130) and a bottom electrode(140). A method for fabricating solar cell includes a passivation process. The passivation process processes thermal process of the solar battery in the thermal anneal environment at the thermal annealing temperature. The passivation process is performed in the thermal process pressure of from 1atm to 100atm.</p> |
