发明名称 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
摘要 According to one embodiment, a semiconductor device includes a semiconductor substrate, a first conductivity-type region, a second conductivity-type source region, a gate insulating film and a gate electrode. The first conductivity-type region is provided in an upper layer portion of the semiconductor substrate. The second conductivity-type source region and a second conductivity-type drain region are arranged by being separated from each other in an upper layer portion of the first conductivity-type region. The gate insulating film is provided on the semiconductor substrate. The gate electrode is provided on the gate insulating film. An effective concentration of impurities in a channel region corresponding to a region directly below the gate electrode in the first conductivity-type region has a maximum at an interface between the gate insulating film and the channel region, and decreases toward a lower part of the channel region.
申请公布号 US2011309439(A1) 申请公布日期 2011.12.22
申请号 US201113052254 申请日期 2011.03.21
申请人 MATSUDAI TOMOKO;ENDO KOICHI;SATO KUMIKO;YASUHARA NORIO;KABUSHIKI KAISHA TOSHIBA 发明人 MATSUDAI TOMOKO;ENDO KOICHI;SATO KUMIKO;YASUHARA NORIO
分类号 H01L29/78;H01L21/336 主分类号 H01L29/78
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