UPPER ELECTRODE ASSEMBLY FOR PLASMA ETCHING,申请号KR20060028186-传众专利搜索

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发明名称	UPPER ELECTRODE ASSEMBLY FOR PLASMA ETCHING
摘要
申请公布号	KR101093747(B1)	申请公布日期	2011.12.19
申请号	KR20060028186	申请日期	2006.03.29
申请人		发明人
分类号	H01L21/30;H01L21/3065	主分类号	H01L21/30
代理机构		代理人
主权项
地址

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