Rotatable Device for Holding a Substrate,申请号KR20077012607-传众专利搜索

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发明名称	Rotatable Device for Holding a Substrate
摘要
申请公布号	KR101089189(B1)	申请公布日期	2011.12.05
申请号	KR20077012607	申请日期	2005.11.03
申请人		发明人
分类号	H01L21/687	主分类号	H01L21/687
代理机构		代理人
主权项
地址

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