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摘要
申请公布号
JP4820542(B2)
申请公布日期
2011.11.24
申请号
JP20040286576
申请日期
2004.09.30
申请人
发明人
分类号
H01L21/82;H01L21/3205;H01L21/822;H01L23/52;H01L27/04
主分类号
H01L21/82
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