| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an engraved mark inspection apparatus enabling a laser beam irradiated on a bottom face of an engraved mark groove to be imaged surely while ensuring imaging brightness of the laser beam irradiated on both oblique faces of the engraved mark groove. <P>SOLUTION: On a moving stage 43, there are provided a first line laser 51 that is arranged on a left side with an engraved mark section 4 of an inspection target 2 being a boundary and a second line laser 52 that is arranged on a right side with the engraved mark section 4 being the boundary. The first line laser 51 irradiates a first line laser beam 61 on an engraved mark face 3, and the second line laser 52 irradiates a second line laser beam 62 on the engraved mark face 3. A CCD camera 71 is provided between both of line lasers 51 and 52 of the moving stage 43 that images the engraved mark section 4 of the inspection target 2 from directly above, and thus, respective line laser beams 61 and 62 irradiated on the engraved mark section 4 can be imaged from a position facing the engraved mark section 4 by the CCD camera 71. <P>COPYRIGHT: (C)2012,JPO&INPIT |
