| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a small-sized pressure sensor with high performance. <P>SOLUTION: The pressure sensor comprises a sensor chip 10; a differential pressure diaphragm 4 provided in a center portion of the sensor chip 10; a first differential pressure gage 5c provided on a first edge of the differential pressure diaphragm 4, and formed along a radial direction with respect to a center of the differential pressure diaphragm 4; a second differential pressure gage 5a provided near the first differential pressure gage 5c on the first edge of the differential pressure diaphragm 4, and formed along a circumferential direction vertical to the radial direction; and a static pressure diaphragm 17 provided outside the differential pressure diaphragm 4, and disposed between any one of other edges except the first edge of the differential pressure diaphragm 4 and an end portion of the sensor chip 10. <P>COPYRIGHT: (C)2012,JPO&INPIT |
