APPARATUS FOR THIN LAYER DEPOSITION AND METHOD FOR MANUFACTURING OF ORGANIC LIGHT EMITTING DISPLAY APPARATUS USING THE SAME AND ORGANIC LIGHT EMITTING DISPLAY APPARATUS USING THE SAME

摘要

PURPOSE: A thin film vapor deposition apparatus, a manufacturing method of an organic light emitting display apparatus using thereof, and an organic light emitting display apparatus which is manufactured using the same are provided to collect a deposition material by separating a blocking plate assembly from a thin film vapor deposition assembly, thereby reducing manufacturing costs by increasing a recycling rate of the deposition material. CONSTITUTION: A vapor deposition source(110) radiates deposition materials(115). A vapor deposition source nozzle part(120) is arranged in one side of the vapor deposition source. A patterning slit sheet(150) is arranged to be facing with the vapor deposition source nozzle part. A blocking plate assembly(130) is arranged between the vapor deposition source nozzle part and patterning slit sheet. The blocking plate assembly includes a blocking plate(131) which divides a space between the vapor deposition source nozzle part and patterning slit sheet into a vapor deposition space.