| 发明名称 |
METHOD FOR SEALING FINE GROOVE WITH SILICEOUS MATERIAL |
| 摘要 |
A method for sealing a fine groove with a siliceous material, characterized as comprising applying a solution of a perhydropolysilazane having a weight average molecular weight in the range of 3,000 to 20,000 in terms of polystyrene to a substrate having at least one groove having a width of 0.2 mu m or less at its deepest portion and having a ratio of the corresponding depth to the width of 2 or more, to thereby fill and seal the groove with the perhydropolysilazane, and then heating the perhydropolysilazane in an atmosphere containing water vapor to thereby convert the perhydropolysilazane to a siliceous material. <IMAGE> |
| 申请公布号 |
EP1278238(B1) |
申请公布日期 |
2011.11.02 |
| 申请号 |
EP20000937324 |
申请日期 |
2000.06.20 |
| 申请人 |
AZ ELECTRONIC MATERIALS USA CORP. |
发明人 |
SHIMIZU, YASUO;TASHIRO, YUUJI;AOKI, TOMOKO |
| 分类号 |
C01B33/12;H01L21/312;C23C18/12;H01L21/316;H01L21/76;H01L21/762;H01L21/768 |
主分类号 |
C01B33/12 |
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