| 摘要 |
PROBLEM TO BE SOLVED: To specify surely a foreign matter by selecting surely a specific component to be absent in an object which is an inspection object; to discriminate surely whether a foreign matter is contaminated in the object or not; and to thereby improve discrimination accuracy.SOLUTION: This device includes a light source part 20 for irradiating an object which is an inspection object with light in a near-infrared region in a prescribed wavelength range, a light receiving part 30 for receiving reflected light or transmitted light from the object, a spectral part 50 for spectrally separating the light received by the light receiving part 30, and a control part 40 for discriminating presence/absence of a foreign matter in the object which is the inspection object based on the absorbance of the spectrally separated light. The control part 40 is constituted by including: a discriminant storage function for storing a discriminant related to an attributable wavelength caused by a specific component calculated by statistical analysis of a second derivative spectrum, in the absorbance to a wavelength in a near-infrared region reflected or transmitted, with which a sample object wherein presence/absence of a foreign matter is known is irradiated, and a foreign matter discrimination function for discriminating presence/absence of a foreign matter in the object from a calculation result calculated from the absorbance of the received light and the discriminant. |
