| 摘要 |
PROBLEM TO BE SOLVED: To provide a wet press apparatus for a silicon powder formed compact and a silicon powder compacting method using the same.SOLUTION: The wet press apparatus 1 comprises a die 9, an upper punch 2, a lower punch 3, a base 8, etc. The inside of the die 9 made of steel is lined with a silicon sheet 10. The upper punch 2 comprises a silicon filter 4a at a face which comes in contact with slurry, a stainless filter 5a behind the filter 4a, and a block 6a with a steel drain outlet 7a behind the filter 5a. A fluorocarbon resin O-ring 19a is attached to the block 6a. In the die 9, the lower punch 3 is disposed behind the upper punch 2. The lower punch 3 comprises a silicon filter 4b, a stainless filter 5b behind the filter 4b, and a block 6b with a steel drain outlet 7b behind the filter 5b. A fluorocarbon resin O-ring 19b is attached to the block 6b. A lower press cylinder 13 which vertically slides the lower punch 3 is attached to the backside of the block 6b. |
