发明名称 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
摘要 Provided are a semiconductor device and a method for manufacturing the same. Since a plug is formed in a portion of a metal interconnection between a first metal contact and a second metal contact, an amount of a metal interconnection coupled to a second metal contact increases. Also, since the first metal contact is formed so that the upper width is narrower than the lower width by using insulation layers having a different etching selectivity when the first metal contact is formed, it is possible to substantially prevent copper ions of the meal interconnection from being migrated or separated according to the flow of a VPP electric field. Consequently, a contact-not-open phenomenon between the first metal contact and the second metal contact may be prevented.
申请公布号 US2011248402(A1) 申请公布日期 2011.10.13
申请号 US20100843501 申请日期 2010.07.26
申请人 HYNIX SEMICONDUCTOR INC. 发明人 CHOI HO SEUNG
分类号 H01L23/48;H01L21/768 主分类号 H01L23/48
代理机构 代理人
主权项
地址