Semiconductor device having two pairs of transistors of different types formed from shared linear-shaped conductive features with intervening transistors of common type on equal pitch

摘要

A semiconductor device includes a substrate portion having a plurality of diffusion regions defined in a non-symmetrical manner relative to a virtual line defined to bisect the substrate portion. A gate electrode level region is formed above the substrate portion to include a number of conductive features defined to extend in only a first parallel direction and fabricated from a respective originating rectangular-shaped layout feature. The gate electrode level region includes conductive features defined along at least four different virtual lines of extent in the first parallel direction. A width size of the conductive features within the gate electrode level region is measured perpendicular to the first parallel direction. Within a five wavelength photolithographic interaction radius within the gate electrode level region, the width size of the conductive features is less than 193 nanometers, which is the wavelength of light used in a photolithography process to fabricate the conductive features.