MOVABLE GATE TYPE ACCELERATION SENSOR

摘要

PROBLEM TO BE SOLVED: To provide a movable gate type acceleration sensor with a displacement measurement range increased.SOLUTION: The movable gate type acceleration sensor is provided with a plurality of sets of source electrodes 17a and 17b and drain electrodes 18a and 18b. Source wirings 19a and 19b are connected to the source electrodes 17a and 17b, respectively. Drain wirings 20a and 20b are connected to the drain electrodes 18a and 18b, respectively. An oblong movable gate 15 is disposed in common above channel forming domains 21 for the respective sets.