| 摘要 |
PROBLEM TO BE SOLVED: To provide a glass substrate with a light shielding film that attains a sufficiently low refractive index in the visible light region and has superior fracture strength.SOLUTION: The glass substrate with the light shielding film has the light shielding film 30 with a multilayer structure formed on a glass substrate 20, and the light shielding film with the multilayer structure has the structure, wherein a first chromium oxynitride film (CrON) 31 and a second chromium oxynitride film (CrON) 32 are laminated in this order from the transparent substrate side. Here, 0.15<x<0.5, 0.1<y<0.35, 0.4<x+y<0.65, 0.03<x<0.15, and 0.09<y<0.25, are satisfied. |
