发明名称 RF ISOLATION FOR POWER CIRCUITRY
摘要 System and method for providing isolated power to a component that is also subject to a set of RF signals that includes at least a first RF signal having a first RF frequency is provided. There is included providing a DC voltage signal and modulating the DC voltage signal into an isolated power signal using an isolation transformer. The isolated power signal has an intermediate frequency that is higher than 60 Hz and lower than the first RF frequency. There is included supplying the DC voltage signal to the primary winding and obtaining the isolated power signal from the secondary winding; and delivering the isolated power to the component using the isolated power signal.
申请公布号 WO2011049993(A3) 申请公布日期 2011.09.29
申请号 WO2010US53263 申请日期 2010.10.19
申请人 LAM RESEARCH CORPORATION;BENJAMIN, NEIL MARTIN PAUL 发明人 BENJAMIN, NEIL MARTIN PAUL
分类号 H05H1/36;H01L21/3065;H02M7/48 主分类号 H05H1/36
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