| 摘要 |
PROBLEM TO BE SOLVED: To provide an image pickup unit which uses an electronic microscope for automatically sorting fine defects, shortens an image acquiring time, decreases a calculation cost of image processing, and suppressing a calculator resource, and to provide a method thereof. SOLUTION: The image pickup unit for defect classification using an electronic microscope is provided with a function of acquiring a defect image 17 and a reference image 16 with resolutions different from each other, and the images are acquired with the reference image resolution lower than that of the defect image. The image pickup unit uses an electronic microscope to automatically sort fine defects. By making the reference image resolution lower than that of the defect image, fine defects can be automatically sorted while shortening the image acquiring time, decreasing the calculation cost of image processing, and suppressing the calculator resource. COPYRIGHT: (C)2011,JPO&INPIT
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