White light interferometric microscope

摘要

A light-interference measuring apparatus including: a light source of a broad band light; an objective lens section to branch an optical path of the broad band light into a reference optical path including a reference mirror and a measuring optical path including a measuring object and to output a superposed wave of two branched lights; and an optical path length changing section to change an optical path length of either the reference optical path or the measuring optical path; wherein the objective lens section includes a phase difference control member to control a phase difference between the reference light and the object light to generate destructive interference fringes at a position of zero-path difference between the reference optical path and the measuring optical path, and a minimum luminance position detecting section to detect minimum luminance position of the destructive interference fringes.