Semiconductor processing components and semiconductor processing utilizing same

摘要

A semiconductor processing component includes a substrate and a layer overlying the substrate. The layer has a composition ReAyO1.5+2y, wherein Re is Y, La, a Lanthanoid series element, or a combination thereof, A is (Si1−aGea), 0.25≦̸y≦̸1.2, and 0≦̸a≦̸1.