发明名称 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
摘要 According to one embodiment, a method for manufacturing a semiconductor device, wherein an amorphous semiconductor film comprising a microcrystal is annealed using a microwave, to crystallize the amorphous semiconductor film comprising the microcrystal using the microcrystal as a nucleus.
申请公布号 US2011215333(A1) 申请公布日期 2011.09.08
申请号 US20100883463 申请日期 2010.09.16
申请人 AOYAMA TOMONORI;OSHIKI YUSUKE;MIYANO KIYOTAKA 发明人 AOYAMA TOMONORI;OSHIKI YUSUKE;MIYANO KIYOTAKA
分类号 H01L29/66;H01L21/20 主分类号 H01L29/66
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