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发明名称
SUBSTRATE CONTAINER
摘要
申请公布号
EP2081223(A4)
申请公布日期
2011.09.07
申请号
EP20070830663
申请日期
2007.10.26
申请人
SHIN-ETSU POLYMER CO. LTD.
发明人
MIMURA, HIROSHI
分类号
H01L21/673;B65D25/10
主分类号
H01L21/673
代理机构
代理人
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地址
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