发明名称 METHOD FOR PRODUCING LAYERS CONTAINING INDIUM OXIDE, LAYERS CONTAINING INDIUM OXIDE PRODUCED ACCORDING TO SAID METHOD AND THE USE THEREOF
摘要 The invention relates to a fluid phase method for producing layers containing indium oxide from a non-aqueous solution, wherein a waterless composition containing at least one indium-halogen alkoxide of the generic formula InX(OR)2, where R = alkyl radical and/or alkoxy alkyl radical and X = F, Cl, Br or I, and at least one solvent or dispersion medium, in the sequence of steps a) to d), is a) applied to a substrate in a waterless atmosphere, b) the composition applied to the substrate is irradiated by electromagnetic radiation having a wavelength of = 360 nm and c) dried as applicable, and then d) thermally converted to an indium oxide layer. The invention further relates to the layers which can be produced according to the method and to use thereof.
申请公布号 WO2011073005(A3) 申请公布日期 2011.09.01
申请号 WO2010EP68185 申请日期 2010.11.25
申请人 EVONIK DEGUSSA GMBH;STEIGER, JUERGEN;PHAM, DUY VU;THIEM, HEIKO;MERKULOV, ALEXEY;HOPPE, ARNE 发明人 STEIGER, JUERGEN;PHAM, DUY VU;THIEM, HEIKO;MERKULOV, ALEXEY;HOPPE, ARNE
分类号 C23C18/12 主分类号 C23C18/12
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