发明名称 ABATEMENT SYSTEM
摘要 Abatement systems are described. An abatement system includes a combustion chamber and a fuel burner ring coupled with the combustion chamber. Another abatement system includes a combustion chamber and a fuel flow control mechanism coupled with the combustion chamber.
申请公布号 KR20110095305(A) 申请公布日期 2011.08.24
申请号 KR20117013222 申请日期 2009.11.09
申请人 APPLIED MATERIALS, INC. 发明人 FOX ALLEN G.
分类号 H01L21/02;H01L21/00 主分类号 H01L21/02
代理机构 代理人
主权项
地址