发明名称 ENERGY TRANSFER AND/OR ION TRANSPORTATION DEVICE AND PARTICLE BEAM DEVICE HAVING THE SAME
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a device which is simple in design and easy in connection of respective elements in the device for transferring energy of ions to at least one gas particle and/or the device for transporting ions. <P>SOLUTION: In the energy transfer and/or ion transportation devices 1200, 1300 for transferring energy of at least one ion to at least one gas particle in a gas, a container 1201 internally containing a gas is prepared, and the container 1201 has a transportation axis. Furthermore, at least one first multipole unit and at least one second multipole unit are arranged, and the first multipole unit and the second multipole unit are arranged along the transportation axis. The first multipole unit and the second multipole unit are formed by a printed circuit board. Furthermore, an electronic circuit is arranged to generate a potential gradient by applying potential to each multipole unit, and especially, the potential gradient is generated along the transportation axis. <P>COPYRIGHT: (C)2011,JPO&INPIT</p>
申请公布号 JP2011159625(A) 申请公布日期 2011.08.18
申请号 JP20110015823 申请日期 2011.01.27
申请人 CARL ZEISS NTS GMBH 发明人 GLASMACHERS ALBRECHT;LAUE ALEXANDER;ALIMAN MICHEL;MANTZ HUBERT;ZEILE ULRIKE;DOEMER HOLGER
分类号 H01J49/06;G01N27/62;H01J49/10 主分类号 H01J49/06
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