发明名称 |
CONFINEMENT OF FOAM DELIVERED BY A PROXIMITY HEAD |
摘要 |
A method suctions liquid from an upper surface of a substrate as the substrate is transported by a carrier under a head in a chamber. This operation is performed by the first section of the head. The method causes a first film of cleaning foam to flow onto the upper surface of the substrate as the substrate proceeds under the head. This operation is performed by a second section which is contiguous to the first section in the head. The method causes a second film of rinsing fluid to flow onto the upper surface of the substrate as the substrate is carried under the head. This rinsing operation is performed by a third section which is contiguous to the second section in the head and which is defined partially around the second section and up to the first section. |
申请公布号 |
KR20110089302(A) |
申请公布日期 |
2011.08.05 |
申请号 |
KR20117011955 |
申请日期 |
2009.11.24 |
申请人 |
LAM RESEARCH CORPORATION |
发明人 |
KHOLODENKO ARNOLD;LIN CHENG YU SEAN;GINZBURG LEON;MANDELBOYM MARK;TOMASCH GREGORY A.;HUSAIN ANWAR |
分类号 |
H01L21/302 |
主分类号 |
H01L21/302 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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