| 摘要 |
<p>Disclosed is a liquid-immersion member forming a liquid-immersion space between the liquid-immersion member and a movable object so that the optical path of the exposure light is filled with liquid. The liquid-immersion member is provided with a first plate disposed at least at part of the periphery of the optical path, a second plate disposed at least at part of the periphery of the optical path and having an upper surface which faces at least part of the lower surface of the first plate and a lower surface which the object can face, and a collecting port which is disposed outside the first plate with respect to the optical path, at least part of which the object can face, and which is used to collect at least part of the liquid from a first space which the upper surface of the second plate faces and from a second space which the lower surface of the second plate faces.</p> |
